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AA- Motorized 3-Axis X-Y-O) Alignment Stage
Micro Motion
Technology Co., Ltd.(MMT) is the leading manufacturer and distributor
of high precision positioning tables and precision components used for
the development and application of advanced research and industrial
applications. This low profile X-Y-Theta stage is suited for the alignment of semiconductor wafers and other products.
Features
- Fine X-Y-T 3-axis alignment stage for inspection system (Hollow hole is optional)
- Travel range : ± 10 mm / ± 10 mm / ± 15°
- High stiffness cross roller guide stage
- 3-axis are on the same plane
- Vacuum environment compatible is optional
- Applications : Precision processing and inspection systems of Semiconductor, LCD, FPD, PCB, etc
Specifications
- Table Size (mm) : 300 x 300
- Travel Range (mm) : ± 10/ ± 10/ ± 15°
- Uni-directional Repeatability : ± 2μm
- Bi-directional Repeatability : ± 4μm
- Accuracy (μm): ± 3
- Straightness (μm): ± 5
- Flatness (μm) : ± 10
- Load Capacity (Kg): 50
- Weight (Kg) : 20
Distribution Region
- China
- Japan
- Taiwan
- USA